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Defect Recognition and Image Processing in Semiconductors 1997: Proceedings of the seventh conference on Defect Recognition and Image Proce
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Defect Recognition and Image Processing in Semiconductors 1997 provides a valuable overview of current techniques used to assess, monitor, and characterize defects from the atomic scale to inhomogeneities in complete silicon wafers. This volume addresses advances in defect analyzing techniques and instrumentation and their application to substrates, epilayers, and devices. The book discusses the merits and limits of characterization techniques; standardization; correlations between defects and device performance, including degradation and failure analysis; and the adaptation and application of standard characterization techniques to new materials. It also examines the impressive advances made possible by the increase in the number of nanoscale scanning techniques now available. The book investigates defects in layers and devices, and examines the problems that have arisen in characterizing gallium nitride and silicon carbide.
- Sales Rank: #4774494 in Books
- Brand: Brand: CRC Press
- Published on: 1998-01-01
- Original language: English
- Number of items: 1
- Dimensions: 9.21" h x 1.19" w x 6.14" l, 2.07 pounds
- Binding: Hardcover
- 524 pages
- Used Book in Good Condition
Review
listed in SPIE-OE Reports No 174, 1998 listed in Scitech Book News, September 1998 Abstracted in INSPEC Database. in SPIE-OE Reports No 174, 1998 listed in Scitech Book News, September 1998 Abstracted in INSPEC Database.
About the Author
Donecker, Institutfur Kristallzuchtung, Berlin.
Rechenberg, Institut fur Kristallzuchtung, Berlin.
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